Our pellicle replacement mask/clean programs are designed to restore used pellicles to top operational form. Our process includes:
- Old/damage pellicle removal
- Mask surface cleaning to remove contamination/haze
- Re-inspection to verify the pattern is undamaged and mask cleanliness.
- Repair of any damage
- Re-attachment of pellicle
- Recertification of phase and transmission values for phase-shift masks.
